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Limited By: Subject = Dry etching;
3 items found
 
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Characterisation of a novel electron beam lithography resist, SML and its comparison to PMMA and ZEP resists (2014)
Gangnaik, Anushka S.; Georgiev, Yordan M.; McCarthy, Brendan; Petkov, Nikolay; Djara, V...
University College Cork
Journal article
peer-reviewed
Science Foundation Ireland
Mark
Dense GaN nanocolumn arrays by hybrid top-down-regrow approach using nanosphere lithography (2018)
Zubialevich, Vitaly Z.; Pampili, Pietro; McLaren, M.; Arredondo-Arechavala, Miryam; Sab...
University College Cork
Conference item
peer-reviewed
Science Foundation Ireland
Mark
Trinity College Dublin
Journal article
peer-reviewed
Displaying Results 1 - 3 of 3 on page 1 of 1
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