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A silicon-based MEMS vibrating mesh nebulizer for inhaled drug delivery
Olszewski, Oskar Zbigniew; MacLoughlin, Ronan; Blake, Alan; O'Neill, Mike; Mathewson, Alan; Jackson, Nathan
This paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. The core element of the nebulizer (vibrating mesh) was fabricated using silicon process and consists of 1000 tapered micro-sized apertures. During operation the mesh vibrates at high frequency with the bending profile corresponding to the 02 resonance mode. The droplet diameter measured at the device output is 3.75 mu m and a typical output rate is 0.45 ml / min.
Keyword(s): Nebulizer; MEMS; Silicon; Piezoelectric; Aerosol; Liquid atomization
Publication Date:
Type: Conference item
Peer-Reviewed: Yes
Language(s): English
Institution: University College Cork
Funder(s): Enterprise Ireland
Citation(s): Olszewski, O. Z., MacLoughlin, R., Blake, A., O’Neill, M., Mathewson, A. and Jackson, N. (2016) ‘A silicon-based MEMS vibrating mesh nebulizer for inhaled drug delivery’, Procedia Engineering, 168, pp. 1521-1524. doi:10.1016/j.proeng.2016.11.451
Publisher(s): Elsevier Ltd
File Format(s): application/pdf
First Indexed: 2017-02-11 05:51:33 Last Updated: 2020-03-12 07:12:12