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Remote sensing of a low pressure plasma in the radio near field
Kelly, Seán; McNally, Patrick J.
A novel approach to remotely monitor low pressure non-equilibrium plasmas is reported. A magnetic field antenna is positioned in the near field of a capacitively coupled plasma. Magnetic flux from plasma currents, present near the viewport, is intercepted via a calibrated loop antenna placed outside the chamber. The induced signal current is correlated to bulk plasma currents. Comparison of relative harmonic amplitudes show resonance features for lower operating pressures. The geometric resonance and electron-neutral collision frequencies are evaluated from resonant harmonic features. Of particular interest to industrial scenarios, this approach advances remote, non invasive and installation free plasma monitoring.
Keyword(s): Spectrum analysis; Plasma processing; Electronic engineering; Microelectronics
Publication Date:
2017
Type: Other
Peer-Reviewed: Unknown
Language(s): English
Institution: Dublin City University
Publisher(s): Japan Society of Applied Physics
File Format(s): application/pdf
Related Link(s): http://doras.dcu.ie/21979/,
https://doi.org/10.7567/APEX.10.096101
First Indexed: 2017-11-30 06:05:45 Last Updated: 2018-08-02 06:08:43