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Investigation of Mn and Ti based self-forming barriers for future back-end-of-the-line interconnects
Selvaraju, Venkateswaran
This thesis focusses on the investigation of the suitability of Mn and Ti-based self-forming barriers for the future generation of interconnects on both thermally grown SiO2 and low-k dielectrics. the self-forming barriers chemically interact with the insulating substrates forming diffusion barriers upon annealing and this fabrication approach has potential application in future generations of interconnect technologies as the resultant barriers can be significantly thinner than the conventionally deposited barrier layers. the principal in-situ characterisation techniques used to study the interface chemistry resulting from the interaction of deposited films with the insulating substrates were soft and hard X-ray photoelectron spectroscopy (XPS and HAXPES). secondary ion mass spectroscopy (SIMS) measurements provided information on the structure of the barriers which could be correlated with the XPS results while electrical measurements (four-point probe and CV measurements) helps in studying the feasibility of the self-forming barriers. Comparison of Mn-based diffusion barriers with and without the incorporation of nitrogen in the film showed that the introduction of nitrogen improved the adhesion of the copper to the dielectric while chemically both had similar interfaces. Cu based alloy films of Mn and Ti were prepared and analysed show that both alloying elements improve the adhesion and electrical characteristics compared to pure copper films. However, while Mn forms a dielectric barrier of manganese silicate, ultrathin films of Ti on SiO2 based dielectrics showed the preferential formation of titanium silicide. Thick cobalt/titanium alloy films were also investigated as a potential interconnect and showed the possibility of using a cobalt-based alloy as a replacement for copper and barrier stack for the future generation of interconnects.
Keyword(s): Semiconductors
Publication Date:
Type: Other
Peer-Reviewed: Unknown
Language(s): English
Contributor(s): Hughes, Greg
Institution: Dublin City University
Citation(s): Selvaraju, Venkateswaran (2019) Investigation of Mn and Ti based self-forming barriers for future back-end-of-the-line interconnects. PhD thesis, Dublin City University.
Publisher(s): Dublin City University. School of Physical Sciences
File Format(s): application/pdf
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First Indexed: 2019-04-04 06:05:20 Last Updated: 2019-04-04 06:05:20